DOI QR코드

DOI QR Code

Structural and Electrical Properties of Semiconducting YBCO Thin Film Annealed at Various Temperatures for Uncooled Infrared Sensor Application

비냉각형 적외선 센서로 응용하기 위한 반도성 YBa2Cu3O6+x 박막의 열처리 온도에 따른 구조적 전기적 특성

  • Lee, Tae-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Lee, Sung-Gap (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Yeo, Jin-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Jung, Hye-Rin (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University)
  • 이태호 (경상대학교 세라믹공학과) ;
  • 이성갑 (경상대학교 세라믹공학과) ;
  • 여진호 (경상대학교 세라믹공학과) ;
  • 정혜린 (경상대학교 세라믹공학과)
  • Received : 2013.07.29
  • Accepted : 2013.09.11
  • Published : 2013.10.01

Abstract

YBCO thin films on $SiO_2$/Si substrate were fabricated by spin-coaing of an alkoxide-derived precursor and heat treatment. The structural and electrical properties of the YBCO films were investigated as functions of annealing temperature at $600{\sim}800^{\circ}C$. Although YBCO single phase was not synthesized, dense films of YBCO matrix phase and minor second phases have been successfully fabricated at the annealing temperatures of $650{\sim}800^{\circ}C$. Thickness and temperature coefficient of resistance (TCR) of YBCO thin films with annealing temperature of $750^{\circ}C$ were 0.31 ${\mu}m$ and $-2.92%/^{\circ}C$, respectively.

Acknowledgement

Supported by : 한국학술진흥재단

References

  1. J. L. Tissot, M. Vilain, A. Crastes, S. Tinner, A. Larre, O. Legras, and J. J. Yon, Proc. SPIE, 5612, 25 (2004).
  2. N. A. Khan, M. Z. Iqbal, and N. Baber, Solid State Commun., 92, 607 (1994). https://doi.org/10.1016/0038-1098(94)00542-7
  3. A. Dasgupta, S. Ghosh, and S. Ray, J . Mater. Sci. Lett., 14, 1037 (1995). https://doi.org/10.1007/BF00258157
  4. M. Longhin, A. J. Kreisler, and A. F. Degardin, Materials Science Forum, 587, 273 (2008).
  5. A. Mahmood, D. P. Butler, and Z. Celik-Butler, Sens. Actuators A, 132, 452 (2006). https://doi.org/10.1016/j.sna.2006.03.006
  6. T. T. Thuy, S. Hoste, G. G. Herman, K. De Buysser, P. Lommens, J. Feys, D. Vandeput, and I. Van Driessche, J . Sol-Gel Sci. Technol., 52, 124 (2009). https://doi.org/10.1007/s10971-009-1987-1