# 플라즈마 표면처리에 따른 유기트랜지스터 특성

• Accepted : 2013.06.20
• Published : 2013.06.30
• 52 76

#### Abstract

In this paper, we fabricated insulator thin films by plasma polymerization method for organic thin film transistor's insulator layer. For improving the electrical characteristics of organic transistor, we treated the semiconductor thin film with $O_2$ plasma. As results, the surface energy of organic transistor was increased from $38mJ/m^2$ to $72mJ/m^2$ and the mobility of organic transistor was increased $0.057cm^2V^{-1}s^{-1}$, that is increased 29% average ratio. Therefore, we have known that oragnic transistor's mobility can improve with plasma treatment of semiconductor thin film's surface.

#### Acknowledgement

Supported by : 남서울대학교

#### Cited by

1. Analysis of Electrical and Optical Characteristics of Silicon Based High Sensitivity PIN Photodiode vol.18, pp.6, 2014, https://doi.org/10.6109/jkiice.2014.18.6.1407