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스퍼터링에 의한 Low-k 박막의 특성

CharacteristicProperties of Low-k Thin Film Deposited by Sputtering

  • Oh, Teresa (Division of Semiconductor, Choenju University)
  • 투고 : 2012.04.16
  • 심사 : 2012.07.12
  • 발행 : 2012.07.31

초록

저온공정을 위해 스퍼터 방법에 의해 SiOC 박막을 증착하였으며, SiOC 박막 위에 투명전극을 제작하기 위해서 AZO박막과 ZnO 박막을 증착하였다. 박막의 광학적 특성은 PL 분석기와 스펙트라포토미터를 이용하였다. SiOC 박막은 n-type Si 위에 증착하였을 때 증착조건에 따라서 방사 효과가 다양하게 나타났으며, 두꺼운 박막에서 blue shit 현상이 나타났다. SiOC/Si 박막 위에 AZO 박막을 증착할 경우 빛의 흡수영역이 넓어졌다. 이러한 특성은 태양전지의 투명전극을 만들 경우 효율을 높일 수 있게 된다.

과제정보

연구 과제 주관 기관 : 청주대학교

참고문헌

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