Fast Simulation of Output Voltage for High-Shock Piezoresistive Microaccelerometer Using Mode Superposition Method and Least Square Method

모드중첩법 및 최소자승법을 통한 고충격 압저항 미소가속도계의 출력전압 해석

  • Han, Jeong-Sam (Dept. of Mechanical Design Engineering, Andong Nat'l Univ.) ;
  • Kwon, Ki-Beom (Dept. of Mechanical Design Engineering, Andong Nat'l Univ.)
  • 한정삼 (안동대학교 기계설계공학과) ;
  • 권기범 (안동대학교 기계설계공학과)
  • Received : 2012.01.27
  • Accepted : 2012.04.26
  • Published : 2012.07.01


The transient analysis for the output voltage of a piezoresistive microaccelerometer takes a relatively high computation time because at least two iterations are required to calculate the piezoresistive-structural coupled response at each time step. In this study, the high computational cost for calculating the transient output voltage is considerably reduced by an approach integrating the mode superposition method and the least square method. In the approach, data on static displacement and output voltage calculated by piezoresistive-structural coupled simulation for three acceleration inputs are used to develop a quadratic regression model, relating the output voltage to the displacement at a certain observation point. The transient output voltage is then approximated by a regression model using the displacement response cheaply calculated by the mode superposition method. A high-impact microaccelerometer subject to several types of acceleration inputs such as 100,000 G shock, sine, step, and square pulses are adopted as a numerical example to represent the efficiency and accuracy of the suggested approach.


Supported by : 한국연구재단


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