PDMS를 이용한 균일한 알루미늄 표면 패터닝 연구

Controllable Patterning of an Al Surface by a PDMS Stamp

  • Park, Gayun (Department of Chemical Engineering, Inha University) ;
  • Kim, Kyungmin (Department of Chemical Engineering, Inha University) ;
  • Lee, Hoyeon (Department of Chemical Engineering, Inha University) ;
  • Park, Changhyun (Department of Chemical Engineering, Inha University) ;
  • Kim, Youngmin (SAMYOUNG S&C CO.LTd) ;
  • Tak, Yongsug (Department of Chemical Engineering, Inha University) ;
  • Choi, Jinsub (Department of Chemical Engineering, Inha University)
  • 발행 : 2012.10.10

초록

본 연구에서는 균일하고 높은 비율의 에치 피트를 갖는 알루미늄 전극을 제작하기 위해 소프트 리소그래피를 이용하여 알루미늄 표면에 보호층을 형성하였다. 알루미늄 표면 위에 잘 정돈된 보호층을 형성하기 위해 다양한 방법을 시도하였으며, 보호층을 이용한 알루미늄 에칭과 보호층이 존재하지 않는 알루미늄 에칭을 비교 관찰하였다. 보호층을 이용하여 알루미늄 에칭을 진행하였을 때, 알루미늄 표면에 균일한 에칭 표면이 확인되었으나, 보호층이 존재하지 않았을 때는 불균일한 표면 에칭이 관찰되었다.

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