Effects of the Electrical Characteristics of Capacitive Relative Humidity Sensor by Polyimide Film and Upper Electrode Grain by Sputtering Method

폴리이미드 박막과 스퍼터링 방법으로 증착한 상부금속 그레인이 용량형 습도센서의 전기적 특성에 미치는 영향

  • Lee, Jin-Min (Institute of Research and Development, ElnT.Co.,Ltd)
  • Received : 2011.01.13
  • Accepted : 2011.02.11
  • Published : 2011.03.01


This research, integratable capacitive relative humidity sensor was produced using polyimide on glass substrate. Also, at the time of upper electrode formation, upper electrode grain size was affected by giving changes to sputtering condition. Through this analyzing electrical characteristics affect from capacitive relative humidity sensor was possible. Capacitance of capacitive relative humidity sensor was 330 pF, linearity of 0.6%FS and it showed less than 3% of low hysterisis. Specially, hysterisis was affected more from interface than interstitial. Also was affected by the grain size which is one of the formation condition of upper electrode.


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