Simulation Study of Capacitively Coupled Oxygen Plasma with Plasma Chemistry including Detailed Electron Impact Reactions

전자충격반응을 포함하는 플라즈마 화학반응을 고려한 용량결합형 산소플라즈마의 전산모사 연구

  • Kim, Heon Chang (Department of Chemical Engineering, Hoseo University)
  • 김헌창 (호서대학교 화학공학과)
  • Received : 2011.09.28
  • Accepted : 2011.10.07
  • Published : 2011.12.10

Abstract

Two dimensional simulation results of a capacitively coupled oxygen plasma in a cylindrical reactor geometry are presented. Detailed electron impact reaction rates, which strongly depend on electron energy, are computed from collision cross sections of electrons with $O_2$ and O. Through the coupling of a three moment plasma model with a neutral chemistry/transport model are predicted spatiotemporal distributions of both charged species (electron, $O_2{^+}$, $O^+$, $O_2{^-}$, and $O^-$) and neutral species including ground states ($O_2$ and O) and metastables, known to play important roles in oxygen plasma, such as $O_2(a^1{\Delta}_g)$, $O_2(b^1{{\Sigma}_g}^+)$, $O(^1D)$, and $O(^1S)$. The simulation results clearly verify the existence of a double layer near sheath boundaries in the electronegative plasma.

Keywords

three moment model;capacitively coupled plasma;oxygen plasma;electron impact reaction;metastables

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