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Evaluation of Machining Characteristics and Performance Analysis of Air-Lubricated Dynamic Bearing

공기동압베어링의 성능 해석 및 가공특성 평가

  • 백승엽 (인덕대학교 기계설계과) ;
  • 김광래 (인덕대학교 기계자동차과)
  • Received : 2011.11.15
  • Accepted : 2011.12.13
  • Published : 2011.12.31

Abstract

The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.

Keywords

Air-lubricated dynamic bearing;Herringbone groove;Current density;Electrolyte;$EC{\mu}M$

Acknowledgement

Supported by : 인덕대학

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