CF4 Treatment Characteristics using an Elongated Arc Reactor

신장 아크 반응기를 이용한 CF4 처리특성

  • Kim, Kwan-Tae (Eco-machinery Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Dae-Hoon (Eco-machinery Research Division, Korea Institute of Machinery & Materials) ;
  • Lee, Jae-Ok (Eco-machinery Research Division, Korea Institute of Machinery & Materials) ;
  • Cha, Min-Suk (Eco-machinery Research Division, Korea Institute of Machinery &Materials) ;
  • Song, Young-Hoon (Eco-machinery Research Division, Korea Institute of Machinery & Materials)
  • 김관태 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 이대훈 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 이재옥 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 차민석 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 송영훈 (한국기계연구원 그린환경에너지기계연구본부)
  • Published : 2010.02.28


$CF_4$ removal characteristics were investigated using an elongated arc reactor. The advantage of the elongated arc reactor includes direct use of treated gas as plasma operating gas and the enhancement of the removal reaction by using a thermo-chemistry and a plasma induced chemistry at the same time. Geometrical configurations, such as the length of the reactor and the shape of a throat, were tested to get an optimized removal efficiency with low power consumption. As results, over 95% of $CF_4$ removal was obtained with 300 lpm of total flowrate for various $CF_4$ concentration (0.1~1%). Corresponding specific energy density (SED), which means required electrical energy to treat the unit volume of treated gas, is about 3.5 kJ/L, The present technique can be applied to real applications by satisfying three major concerns, those are the high flowrate of treated gas, high removal efficiency (> 95%), and low power consumption (< 10 kJ/L).


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