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CF4 Treatment Characteristics using an Elongated Arc Reactor

신장 아크 반응기를 이용한 CF4 처리특성

  • Published : 2010.02.28

Abstract

$CF_4$ removal characteristics were investigated using an elongated arc reactor. The advantage of the elongated arc reactor includes direct use of treated gas as plasma operating gas and the enhancement of the removal reaction by using a thermo-chemistry and a plasma induced chemistry at the same time. Geometrical configurations, such as the length of the reactor and the shape of a throat, were tested to get an optimized removal efficiency with low power consumption. As results, over 95% of $CF_4$ removal was obtained with 300 lpm of total flowrate for various $CF_4$ concentration (0.1~1%). Corresponding specific energy density (SED), which means required electrical energy to treat the unit volume of treated gas, is about 3.5 kJ/L, The present technique can be applied to real applications by satisfying three major concerns, those are the high flowrate of treated gas, high removal efficiency (> 95%), and low power consumption (< 10 kJ/L).

Keywords

PFCs(Perfluorocompounds);Tetrafluoromethane($CF_4$);Elongated arc;Abatement

References

  1. Chang, M.B. and J.-S. Chang (2006) Abatement of PFCs from semiconductor manufacturing process by nonthermal plasma technologies, A critical review, Ind. Eng. Chem. Res., 45, 4101-4109. https://doi.org/10.1021/ie051227b
  2. Fridman, A., S. Nester, L.A. Kennedy, A. Saveliev, and O. Mutaf-Yardimci (1999) Gliding arc gas discharge, Progress in Energy and Combustion Science, 25, 211-231. https://doi.org/10.1016/S0360-1285(98)00021-5
  3. Glocker, B., G. Nentwig, and E. Messerschmid (2000) 1-40 kW steam respectively multi gas thermal plasma torch system, Vacuum, 59, 35-46. https://doi.org/10.1016/S0042-207X(00)00252-9
  4. International SEMATECH Technology Transfer (1998) Current status of technology: Perfluorocompound (PFC) Emissions reduction, #98053508A-TR.
  5. International SEMATECH Technology Transfer (1999) Long- Term Evaluation of the Litmas "Blue" Plasma Device for Point-of-Use (POU) Perfluorocompound and Hydro fluorocarbon Abatement, #99123865BENG.
  6. Kim, D. and D.W. Park (2008) Decomposition of PFCs by steam plasma at atmospheric pressure, Surf. & Coat. Tech. 202, 5280-5283. https://doi.org/10.1016/j.surfcoat.2008.06.023
  7. Kim, K.-T., Y.-H. Kim, M.S. Cha, Y.-H. Song, S.-J. Kim, and J.-I. Ryu (2004) Decomposition characteristics of PFCs for various discharge methods in dielectric barrier discharge, Korean J. of Atmos. Environ., 20(5), 625-632. (in Korean with English abstract)
  8. Kim, K.-T., Y.-H. Song, M.S. Cha, D.H. Lee, and D.-H. Kim (2008) Characteristics of rotating arc for $CF_{4}$ removal, Int. J. Environment and Waste Management, 2, 412-422. https://doi.org/10.1504/IJEWM.2008.021782
  9. Nishikawa, H., M. Ibe, M. Tanaka, M. Ushio, T. Takemoto, K. Tanaka, N. Tanahashi, and T. Ito (2004) A treatment of carnonaceous wastes using thermal plasma with steam, Vacuum, 73, 589-593. https://doi.org/10.1016/j.vacuum.2003.12.074
  10. Park, D.-W. and H.-S. Seon (2009) Thermal plasma process for decomposing PFCs, J. of Environmental & Thermal Eng., 6(1), 89-98. (in Korean with English abstract)
  11. Watanabe, T. and T. Tsuru (2008) Water plasma generation under atmosphere pressure for HFC destruction, Thin Solid Films, 516, 4391-4396. https://doi.org/10.1016/j.tsf.2007.10.062

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