Hydrophobic Properties on RF-sputtered PTFE Films coated on UV-treated Glass Substrates

UV 처리된 유리기판위에 RF-스퍼터된 PTFE 박막들의 발수 특성

  • 손진운 (울산대학교 전기전자정보시스템공학부) ;
  • 윤현오 (대구가톨릭대학교 전자공학과) ;
  • 배강 (대구가톨릭대학교 전자공학과) ;
  • 손선영 (대구가톨릭대학교 전자공학과) ;
  • 김화민 (대구가톨릭대학교 전자공학과)
  • Published : 2010.01.01


Surface properties of polytetrafluoroethylene(PTFE) films fabricated by rf-magnetron sputtering system with UV surface treatment were investigated to increase water contact angle for their hydrophobic property. We found that the surface morphology and water contact angles of PTFE film modified as a function of the UV treatment times using UV-irradiation were influenced. The water contact angle of PTFE film with optimized UV treatment time for 15 minute showed a high hydrophobicity compared with the film without any surface treatment. We thought that it was due to the energy change of PTFE surface with an adhesion improvement to the glass surface as a smoothing a rough surface with needle-shape and/or the enhancement of an interface property as a removing some defects on the surface like a cleaning effect.


  1. P. Smith and P. J. Lemstra, "Ultra-high-strength polyethylene filaments by solution spinning/drawing", J. Mater. Sci., Vol. 15, p. 505, 1980.
  2. P. J. Rae and E. N. Brown, "The properties of poly(tetrafluoroethylene) (PTFE) in tension", Polymer, Vol. 46, p. 8128, 2005.
  3. 김익준, 이선영, 문성인, “ELC용 Carbon-PTFE 전극의 제조 및 전기화학적 특성”, 전기전자재료학회논문지, 18권, 9호, p. 833, 2005.
  4. P. Machetta, M. Lazzarino, S. Carrato, C. Schmidt, G. Canil, V. Kapeliouchko, T. Poggio, and A. Sanguineti, "PTFE nanoemulsions as ultralow-k dielectric materials", Mater. Sci. Semicond. Process, Vol. 5, p. 285, 2003.
  5. L. Ylianttila and J. Schreder, "Temperature effects of PTFE diffusers", Opt. Mater., Vol. 27, p. 1811, 2005.
  6. Y. W. Yang, C. W. Chen, Y. Z. Wu, and Y. C. Chen, "High performance circuit boards based on mesoporous silica filled PTFE composite materials", Elec. Sol. Stat. Lett., Vol. 8, p. 1, 2005.
  7. C. J. Rong and T. Wakida, "Studies on the surface free energy and surface structure of PTFE film treated with low temperature plasma", J. Appl. Polym. Sci., Vol. 63, p. 1733, 1997.<1733::AID-APP4>3.0.CO;2-H
  8. Y. Okuda, F. Hayashi, H. Sakurai, and M. Shiotani, "A spectroscopic study on defluorination of poly(tetrafluoroethylene) by alkyllithium/electron-donating solvents", J. Appl. Polym. Sci., Vol. 94, p. 923, 2004.
  9. D. J. Wilsion, R. L. Williams, and R. C. Pond, “Plasma modification of PTFE surfaces”, Surf. Inter. Anal., Vol. 31, p. 385, 2001.
  10. C. Z. Liu, J. Q. Wu, L.Q. Ren, J. Tong, J. Q. Li, N. Cui, N. M. D. Brown, and B. J. Meenan, "Comparative study on the effect of RF and DBD plasma treatment on PTFE surface modification", Mater. Chem. Phys., Vol. 85, p. 340, 2004.
  11. L. Guzman, B. Y. Man, A. Miotello, M. Adami, and P. M. Ossi, "Ion beam induced enhanced adhesion of Au films deposited on polytetrafluoroethylene", Thin Solid Films, Vol. 420-421, p. 565, 2002.
  12. Y. Haruyama, T. Ideta, H. Ishigaki, K. Kanda, and S. Matsui, "X-ray photoelectron spectroscopy study of synchrotron radiation irradiation of a polytetrafluoroethylene surface", Jpn. J. Appl. Phys., Vol. 42, p. 1722, 2003.
  13. 권순일, 양계준, 송우창, 임동건, “$SF_6,\;C_4F_8,\;O_2$ 가스변화에 따른 실리콘 식각율과 식각 형태 개선”, 전기전자재료학회논문지, 21권, 4호, p. 305, 2008.

Cited by

  1. Dielectric Characteristics of Polytetrafluoroethylene-based Composites for Microwave Substrates with Formation Pressure vol.26, pp.6, 2013,