A Study on Electrical Characteristics of Trench Field Ring for Breakdown Characteristics

내압특성개선을 위한 트렌치 필드링 설계 및 전기적특성에 관한 연구

  • 강이구 (극동대학교 컴퓨터정보표준학부) ;
  • 김범준 (극동대학교 컴퓨터정보표준학부) ;
  • 이용훈 (극동대학교 컴퓨터정보표준학부)
  • Published : 2010.01.01


In this paper, we proposed trench field ring for breakdown voltage of power devices. The proposed trench field ring was improved 10% efficiency comparing with conventional field ring. we analyzed five parameters of trench field ring for design of trench field ring and carried out 2-D devices simulation and process simulations. That is, we analyzed number of field ring, juction depth, distance of field rings, trench width, doping profield. The proposed trench field ring was better to more 1000 V.


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