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Fabrication of Pair-Photonic Crystal Arrays using Multiple-Exposure Nanosphere Lithography

다중노광 나노구 리소그라피를 이용한 쌍-광자결정 어레이 제작

  • 여종빈 (전남대학교 신화학소재공학과) ;
  • 한광민 (전남대학교 신화학소재공학과) ;
  • 이현용 (전남대학교 응용화학공학부)
  • Published : 2010.03.01

Abstract

Two dimensional(2D) pair-photonic crystals (pair-PCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method using the self-assembled nanospheres as lens-mask patterns and the collimated laser beam as a multiple-exposing source. The arrays of the 2D pair-PCs exhibited variable lattice structures and shape the control of rotating angle (${\Theta}$), tilting angle (${\gamma}$) and the exposure conditions. In addition, the base period or filling factor of pair-PCs as well as their shapes could be changed by experimental conditions and nanosphere size. A 1.18-${\mu}m$-thick resist was spincoated on Si substrate and the multiple exposure was carried out at change of ${\gamma}$ and ${\Theta}$. Images of prepared 2D pair-PCs were observed by SEM. We believe that the MENSL method is a suitable useful tool to realize the pair-periodic arrays of large area.

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