Adsorption Measurement of Thin Film Using a Quartz Crystal Resonator

수정진동자를 이용한 박막의 흡착 측정

  • Kim, Byoung Chul (Department of Chem. Eng., Dong-A Univ.) ;
  • Park, Jung Woo (Department of Chem. Eng., Dong-A Univ.) ;
  • Kim, Young Han (Department of Chem. Eng., Dong-A Univ.)
  • 김병철 (동아대학교 화학공학과) ;
  • 박정우 (동아대학교 화학공학과) ;
  • 김영한 (동아대학교 화학공학과)
  • Received : 2010.02.11
  • Accepted : 2010.04.05
  • Published : 2010.06.30

Abstract

A technique to measure the adsorption characteristic of surface area and pore size of a ceramic thin film is proposed, and its performance is examine. The thin film is fabricated directly on the resonator surface to measure the adsorption capacity of the film as it is, and using carbon dioxide makes the measurement easy. The results indicates that the measured surface area is satisfactory, while the pore size has some error. It is suggested that readily available carbon dioxide can be used to determine adsorption capacity of thin film at room temperature.

Keywords

Adsorption Characteristic Determination;Quartz Crystal Resonator;TEOS

Acknowledgement

Supported by : 동아대학교

References

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