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Experimental Performance Evaluation of MR Damper for Integrated Isolation Mount

통합제진마운트용 MR 댐퍼의 실험적 성능 평가

  • Received : 2010.09.09
  • Accepted : 2010.10.08
  • Published : 2010.12.20

Abstract

This paper presents experimental performance evaluation of a magnetorheological(MR) damper for integrated isolation mount for ultra-precision manufacturing system. The vibration sources of the ultra-precision manufacturing system can be classified as follows: the one is the environmental vibration from the floor and the other is the transient vibration occurred from stage moving. The transient vibration occurred from the stage moving has serious adverse effect to the process because the vibration scale is quite larger than other vibrations. Therefore in this research, a semi-active MR damper, which can control the transient vibration, is adopted. Also the stage needs to be isolated from tiny vibrations from the floor. For this purpose, a dry-frictionless MR damper is required. In order to achieve this goal, a novel type of MR damper is originally designed and manufactured in this work. Subsequently, the damping force characteristics of MR damper are evaluated by simulation and experiment. In addition, the vibration control performance of the MR damper associated with the stage mass is evaluated.

References

  1. Smith, S. T. and Seugling, R. M., 2006, “Sensor and Actuator Considerations for Precision, Small Machines,” Precision Engineering. Vol. 30, pp. 245-264. https://doi.org/10.1016/j.precisioneng.2005.10.003
  2. Bringmann, B. and Maglie, P., 2009, “A Method for Direct Evaluation of the Dynamic 3D Path Accuracy of NC Machine Tools,” Manufacturing Technology, Vol. 58, pp. 343-346.
  3. Rahman, M., Asad, A. B. M. A., Masaki, T., Saleh, T., Wong, Y. S. and Kumar, A. S., 2010, “A Multiprocess Machine Tool for Compound Micromachining,” International Journal of Machine Tools & Manufacture, Vol. 50, pp. 344-356. https://doi.org/10.1016/j.ijmachtools.2009.10.007
  4. Kato, T., Kawashima, K., Funaki, T., Tadano, K. and Kagawa, T., 2010, “A New, High Precision, Quick Response Pressure Regulator for Active Control of Pneumatic Vibration Isolation Tables,” Precision Engineering, Vol. 34, pp. 43-48. https://doi.org/10.1016/j.precisioneng.2009.01.008
  5. Huang, X., Elliot, S. J. and Brennan, M. J., 2003, “Active Isolation of a Flexible Structure from Base Vibration,” Journal of Sound and Vibration. Vol. 263, pp. 357-376. https://doi.org/10.1016/S0022-460X(02)01057-X
  6. Hong, S. R., Choi, S. B. and Han, M. S., 2002, “Vibration Control of a Frame Structure Using Electro-rheological Fluid Mounts,” International Journal of Mechanical Sciences, Vol. 44, pp. 2027-2045. https://doi.org/10.1016/S0020-7403(02)00172-8
  7. Wang, X. and Gordaninejad, F., 2009, “A New Magnetorheological Fluid-elastomer Mount : Phenomenological Modelling and Experimental Study,” Smart Materials and Structures, Vol. 18, pp. 1-9.
  8. Seong, M. S., Sung, K. G., Han, Y. M., Choi, S. B. and Lee, H. G., 2008, “Vibration Control of MR Suspension System Considering Damping Force Hysteresis,” Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 18, No. 3, pp. 315-322. https://doi.org/10.5050/KSNVN.2008.18.3.315
  9. Seong, M. S., Lim, S. G., Choi, S. B., Kim, C. H. and Woo, J. K., 2010, “Design and Performance Evaluation of MR Damper for Integrated Isolation Mount,” Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 20, No. 11, pp. 1046-1051. https://doi.org/10.5050/KSNVE.2010.20.11.1046
  10. Sung, K. G. and Choi, S. B., 2008, “Effect of an Electromagnetically Optimized Magnetorheological Damper on Vehicle Suspension Control Performance,” Proceedings of the Institution of Mechanical Engineers Part D: Journal of Automobile Engineering, Vol. 222, pp. 2307-2319. https://doi.org/10.1243/09544070JAUTO901

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