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Array of 2-dimensions and Vertical Alignment of Zinc Oxide Micro Rod by the CBD Method

CBD법에 위한 ZnO 마이크로 막대 구조체의 2차원 배열 및 수직정렬

  • 이역규 (영남대학교 나노시스템공학과) ;
  • 남효덕 (영남대학교 전자정보공학부) ;
  • 이상환 (영남대학교 디스플레이화학공학부) ;
  • 전찬욱 (영남대학교 디스플레이화학공학부)
  • Published : 2009.08.01

Abstract

A periodic away of zinc oxide(ZnO) micro-rods as fabricated by using chemical bath deposition and photo-lithography. Vertically aligned ZnO micro-rods array was successfully grown by chemical bath deposition method on ZnO seed layer. The ZnO seed layer was deposited on glass and the patterning was made by standard photo-lithography technique. The selective growth of ZnO micro-rods as achieved with the masked ZnO seed layer. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO seed layer.

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