Array of 2-dimensions and Vertical Alignment of Zinc Oxide Micro Rod by the CBD Method

CBD법에 위한 ZnO 마이크로 막대 구조체의 2차원 배열 및 수직정렬

  • 이역규 (영남대학교 나노시스템공학과) ;
  • 남효덕 (영남대학교 전자정보공학부) ;
  • 이상환 (영남대학교 디스플레이화학공학부) ;
  • 전찬욱 (영남대학교 디스플레이화학공학부)
  • Published : 2009.08.01


A periodic away of zinc oxide(ZnO) micro-rods as fabricated by using chemical bath deposition and photo-lithography. Vertically aligned ZnO micro-rods array was successfully grown by chemical bath deposition method on ZnO seed layer. The ZnO seed layer was deposited on glass and the patterning was made by standard photo-lithography technique. The selective growth of ZnO micro-rods as achieved with the masked ZnO seed layer. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO seed layer.


  1. M. A. Martinez, J. Herrero, and M. T. Gutierrez, 'Deposition of transparent and conductive Al-doped ZnO thin films for photovoltaic solar cells', Solar Energy Materials and Solar Cells, Vol. 45, p. 76, 1997
  2. Q. A. Xu, J. W. Zhang, K. R. Ju, X. D. Yang, and X. Hou, 'ZnO thin film photoconductive ultraviolet detector with fast photoresponse', J. Crstal Growth, Vol. 289, p. 44, 2006
  3. H. Kim and C. M. Gilmore, 'Transparent conducting aluminum-doped Zinc oxide thin films for organic light-emitting devices', Appl. Phys. Lett., Vo. 76, No. 3, p. 259, 2000
  4. Y. Ding, P. X. Gao, and Z. L. Wang, 'Catalyst-nanostructure interfacial lattice mismatch in determining the shape of VLS Grown nanowires and nanobelts: A case of Sn/ZnO', J. Am. Chem. Soc., Vol. 126, p. 2066, 2004
  5. A. Dadgar, A. krtschil, F. Bertram, S. Giemsch, T. Hempel, P. Veit, A. Diez, N. Oleynik, R. Clos, J. Christen, and A. Krost, 'ZnO MOVPE growth: From local impurity incorporation p-type doping', Superlattices and Microstructures, Vol. 38, p. 246, 2005
  6. X. Gao, X. Li, and W. Yu, 'Flowerlike ZnO nanostructures via hexamethylenetetramin- assisted thermolysis of zinc-ethylenediamine complex', J. Phys. Chem., Vol. 109, p. 1155, 2005
  7. X. Liu, Z. Jin, S. Bu, J. Zhao, and Z. Liu, 'Crowth of ZnO films with controlled morphology by aqueous solution method', J. Am. Ceram. Soc., Vol. 89, No. 4, p. 1226, 2006
  8. P. Y. Wu, J. Pike, F. Zhang, and S. W. Chan, 'Low-temperature synthesis of zinc oxide nanoparticles', Int. J. Appl. Ceram. Technol., Vol. 3, No. 4, p. 272, 2006
  9. 이삼동, 진미진, 신경식, 정순욱, 김상우, '습식화학방법에 의해 다양한 기판위에 ZnO 나노구조물의 성장', 전기전자재료학회논문지, 21권, 7호, p. 599, 2008
  10. L. L. Yang, Q. X. Zhao, M. Willander, and J. H. Yang, 'Effective way to control the size of well-aligned ZnO nanorod arrays with two-step chemical bath deposition', J. Crystal Growth, Vol. 311, p. 1046, 2009
  11. Z. Chen and L. Gao, 'A facile route to ZnO nanorod arrays using wet chemical method', J. Crystral Growth, Vol. 293, p. 527, 2006
  12. D. S. Boyle, K. Govender, and P. O'Brien, 'Novel low temperature solution deposition of perpendicularly orientated rods of ZnO: substrate deffects and evidence of the importance of counter-ions in the control of crystallite growth', Chem. Comm., p. 81, 2002