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Improvement of Dynamic Characteristic of Large-Areal Planar Stage Using Induction Principle

인덕션 방식을 이용한 평면 스테이지의 동특성 개선

  • 정광석 (충주대학교 기계공학과) ;
  • 박준규 (충주대학교 기계공학과 대학원) ;
  • 김효준 (강원대학교 기계자동차공학부 기계공학과)
  • Published : 2009.07.01

Abstract

Instead of direct driving like BLDC, the induction principle is adopted as a driving one for planar stage. The stage composed of four linear induction motors put in square type is activated by two-axial forces; low-frequency attractive force and thrust force of the linear induction motors. Here, the modified vector control whose new inputs are q-axis current and dc current biased to three phase current instead of d-axis current or flux current is applied extensively to overall motion of the stage. For the developed system, the precision step test and the constant velocity test are tried to guarantee its feasibility for TFT-LCD pattern inspection. However, to exclude a discontinuity due to phase shift and minimize a force ripple synchronized with the command frequency, the initial system is revised to the antagonistic structure over the full degree of freedom. Concretely describing, the porous air bearings guide an air-gapping of the stage up and down and a pair of liner induction motors instead of single motor are activated in the opposite direction each other. The performances of the above systems are compared from trapezoid tracking test and sinusoidal test.

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