MOCVD를 이용한 BiSbTe3 박막성장 및 열전소자 제작

Properties of BiSbTe3 Thin Film Prepared by MOCVD and Fabrication of Thermoelectric Devices

  • 권성도 (고려대학교 DIANA연구실) ;
  • 윤석진 (한국과학기술연구원 박막재료연구센터) ;
  • 주병권 (고려대학교 DIANA연구실) ;
  • 김진상 (한국과학기술연구원 박막재료연구센터)
  • 발행 : 2009.05.01


Bismuth-antimony-telluride based thermoelectric thin film materials were prepared by metal organic vapor phase deposition using trimethylbismuth, triethylantimony and diisopropyltelluride as metal organic sources. A planar type thermoelectric device has been fabricated using p-type $Bi_{0.4}Sb_{1.6}Te_3$ and n-type $Bi_{2}Te_{3}$ thin films. Firstly, the p-type thermoelectric element was patterned after growth of $5{\mu}m$ thickness of $Bi_{0.4}Sb_{1.6}Te_3$ layer. Again n-type $Bi_{2}Te_{3}$ film was grown onto the patterned p-type thermoelectric film and n-type strips are formed by using selective chemical etchant for $Bi_{2}Te_{3}$. The top electrical connector was formed by thermally deposited metal film. The generator consists of 20 pairs of p- and n-type legs. We demonstrate complex structures of different conduction types of thermoelectric element on same substrate by two separate runs of MOCVD with etch-stop layer and selective etchant for n-type thermoelectric material. Device performance was evaluated on a number of thermoelectric devices. To demonstrate power generation, one side of the device was heated by heating block and the voltage output was measured. The highest estimated power of 1.3 ${\mu}m$ is obtained at the temperature difference of 45 K.


  1. H. Zou, D. M. Powe, and G. Min, 'Growth of p- and n-type bismuth telluride thin films by co-evaporation', J. Crystal Growth, Vol. 222, p. 82, 2001
  2. C. Shafai and M. J. Brett, 'Optimization of $Bi_2Te_3$ thin films for microintegrated Peltier heat pumps', J. Vac. Sci. Technol. A, Vol. 15, p. 2798, 1997
  3. G. J. Snyder, J. R. Lim, C.-K. Huang, and J.-P. Fleurial, 'Thermoelectric microdevice fabricated by a MEMS-like electrochemical process', Nature Materials, Vol. 2, p. 528, 2003
  4. J.-H. Kim, D.-Y. Jeong, B.-K. Ju, and J.-S. Kim, 'MOVPE of $BiSbTe_3 $ films on (001) GaAs Vicinal Substrates', Journal of Applied Physics, Vol. 100, p. 123501-1, 2006
  5. H. B¨ottner, A. Schubert, K. H. Schlereth, D. Eberhard, A. Gavrikov, M. J¨agle, G. K¨uhner, and C. K¨unzel, 'New thermoelectric components using microsystem technologies', J. Nurnus, G. Plescher, J. Microelectromech. Syst., Vol. 13, p. 414, 2004
  6. M. Takashiri, T. Shirakawa, K. Miyazaki, and H. Tsukamoto, 'Fabrication and characterization of bismuthtelluride based alloy thin film thermo - electric generators by flash evaporation method', Sensors and Actuators A, Vol. 138, p. 329, 2007