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MOCVD를 이용한 BiSbTe3 박막성장 및 열전소자 제작

Properties of BiSbTe3 Thin Film Prepared by MOCVD and Fabrication of Thermoelectric Devices

  • 권성도 (고려대학교 DIANA연구실) ;
  • 윤석진 (한국과학기술연구원 박막재료연구센터) ;
  • 주병권 (고려대학교 DIANA연구실) ;
  • 김진상 (한국과학기술연구원 박막재료연구센터)
  • 발행 : 2009.05.01

초록

Bismuth-antimony-telluride based thermoelectric thin film materials were prepared by metal organic vapor phase deposition using trimethylbismuth, triethylantimony and diisopropyltelluride as metal organic sources. A planar type thermoelectric device has been fabricated using p-type $Bi_{0.4}Sb_{1.6}Te_3$ and n-type $Bi_{2}Te_{3}$ thin films. Firstly, the p-type thermoelectric element was patterned after growth of $5{\mu}m$ thickness of $Bi_{0.4}Sb_{1.6}Te_3$ layer. Again n-type $Bi_{2}Te_{3}$ film was grown onto the patterned p-type thermoelectric film and n-type strips are formed by using selective chemical etchant for $Bi_{2}Te_{3}$. The top electrical connector was formed by thermally deposited metal film. The generator consists of 20 pairs of p- and n-type legs. We demonstrate complex structures of different conduction types of thermoelectric element on same substrate by two separate runs of MOCVD with etch-stop layer and selective etchant for n-type thermoelectric material. Device performance was evaluated on a number of thermoelectric devices. To demonstrate power generation, one side of the device was heated by heating block and the voltage output was measured. The highest estimated power of 1.3 ${\mu}m$ is obtained at the temperature difference of 45 K.

참고문헌

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