A Comparative Study on the Electrostatic Eliminator of Piezo Type Ionizer and Pulse AC Corona Type Ionizer

피에조를 이용한 코로나 방전과 펄스교류 코로나 방전을 이용한 정전기 제거장치의 비교 연구

  • Kwon, Sung-Yul (Department of Safety Engineering, Graduate School, Pukyong National University) ;
  • Lee, Dong-Hoon (Division of Safety Engineering, Pukyong National University) ;
  • Choi, Jae-Wook (Division of Safety Engineering, Pukyong National University)
  • 권승열 (부경대학교 공과대학 대학원 안전공학과) ;
  • 이동훈 (부경대학교 공과대학 안전공학부) ;
  • 최재욱 (부경대학교 공과대학 안전공학부)
  • Published : 2009.12.31

Abstract

Ionizer is used for improving manufacturing process and reducing inferior goods in the clean room. As a general rule, neutralization of the electrostatic charge is most important to make TFT-LCD, PDP and OLED. Pulse AC-static eliminator with output voltage of about 10.5kV has been used these days as neutralization device. But this device has a problem with lower performance which was caused by particles-adhesion on the electrode when it has been used for a long time. So we studied to solve the problem with lower performance using high Frequency(72kHz) static eliminator which was produced by Piezo transformer device, and compared Pulse-AC type with Piezo-electronic device such as decay time and ion balance for 10 weeks periods. As a result of this study, we found that Piezo transformer device has been maintained normal condition for 10 weeks. Also, we made the rule by this study, normally Piezo transformer device has to clean the electrode during every 11th weeks.

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