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Electrical Properties of Diamond-like Carbon Thin Film synthesized by PECVD

PECVD로 합성한 다이아몬드상 카본박막의 전기적 특성

  • Published : 2008.11.01

Abstract

In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. We examined the effects of the RF power on the electrical properties of the DLC films. The films were deposited at several RF powers ranging from 50 to 175 W in steps of 25 W. The leakage current of DLC films increased at higher deposition RF power. And the resistivities of DLC films grown at 50 W and 175 W were $5\times10^{11}$ ${\Omega}cm$ and $2.68\times10^{10}$ ${\Omega}cm$, respectively.

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  1. Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method vol.22, pp.5, 2009, https://doi.org/10.4313/JKEM.2009.22.5.411