A Study on the Dry Cleaning of Aluminium Surfaces by Low Temperature Plasma Process

저온 플라스마 공정을 이용한 알루미늄 표면의 건식 세정에 관한 연구

  • Lim, Gyeong-Taek (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University) ;
  • Kim, Kyung Hwan (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Kim, Kyung Seok (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Li, Hui Jie (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Song, Sun Jung (School of Applied Chemical Engineering and Center for Functional Nano Fine Chemicals, Chonnam National University) ;
  • Shon, Hokyong (Faculty of Engineering, University of Technology, Sydney) ;
  • Cho, Dong Lyun (Research Institute for Catalysis and Center for Photonic Materials and Devices, Chonnam National University)
  • 임경택 (전남대학교 촉매연구소, 전남대학교 광소재부품연구센터) ;
  • 김경환 (전남대학교 응용화학공학부, BK21 기능성 나노 신화학소재 사업단) ;
  • 김경석 (전남대학교 응용화학공학부, BK21 기능성 나노 신화학소재 사업단) ;
  • 이휘지 (전남대학교 응용화학공학부, BK21 기능성 나노 신화학소재 사업단) ;
  • 송선정 (전남대학교 응용화학공학부, BK21 기능성 나노 신화학소재 사업단) ;
  • 손호경 (시드니 공과대학교 환경공학부) ;
  • 조동련 (전남대학교 촉매연구소, 전남대학교 광소재부품연구센터)
  • Received : 2008.09.04
  • Accepted : 2008.09.27
  • Published : 2008.12.10

Abstract

Lubricating oil on aluminium surfaces was cleaned by a low temperature plasma process. Oxygen plasma mixed with argon was used, and process parameters were the mixing ratio of argon in oxygen, discharge power, and negative DC potential. The aluminium surfaces were analyzed with FTIR and EDX after the cleaning. It was found that almost all of the oil was eliminated in 20 min. if the oil was pure. Elimination efficiency was highly dependent on operational conditions of the process. The highest efficiency was obtained when treated at 300 W with oxygen plasma mixed with 30% argon applying negative potential more than -500 V on the aluminium surfaces. However, efficiency higher that 60% cannot be obtained at any condition if the oil contained inorganic materials.

Keywords

low temperature plasma;elimination efficiency;discharge power;negative DC potential

Acknowledgement

Supported by : 한국학술진흥재단

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