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The highly sensitive NO2 gas sensor using ZnO nanorods grown by the sol-gel method

졸-겔법으로 증착된 ZnO 나노막대를 이용한 고감도 이산화질소 가스 센서 제작 및 특성 연구

  • 박소정 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 곽준혁 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 박종혁 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 이홍열 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 문승언 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 박강호 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 김종대 (한국전자통신연구원 IT융합부품연구소 IT-NT그룹 나노융합센서팀) ;
  • 김규태 (고려대학교)
  • Published : 2008.03.31

Abstract

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

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  1. 3-dimensional nanostructured ZnO gas sensor vol.19, pp.5, 2010, https://doi.org/10.5369/JSST.2010.19.5.356