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Electrical Properties of Ring-type Multilayer Piezoelectric Actuator

원환형 적층 압전 액츄에이터의 전기적 특성

  • Published : 2007.10.01

Abstract

In this study, in order to develop low temperature sintering ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric actuators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. A ring-type piezoelectric actuator was modeled by ATILA program using finite element method(FEM). The piezoelectric actuator dimension was $\Phi26.5$ (outer diameter), $\Phi12$ (inner diameter), 3.5 mm (thickness). By FEM analysis, resonant and anti-resonant frequencies were appeared as 56.7 kHz and 61.5 kHz. The displacement increased with the increases of the number of layer. Based on the result, ring-type multilayer piezoelectric actuators were manufactured at low co-firing temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

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  1. Vibration Characteristics of Stacked Piezoelectric Transducers vol.25, pp.3, 2015, https://doi.org/10.5050/KSNVE.2015.25.3.199