Design and Characteristics of a Monolithic Inchworm Type Actuator(MITA)

일체형 인치웜 방식 액츄에이터의 설계 및 특성

  • 강형원 (전자부품연구원 전자소재패키징연구센터) ;
  • 최용준 (전자부품연구원 전자소재패키징연구센터) ;
  • 이형규 (전자부품연구원 전자소재패키징연구센터)
  • Published : 2007.08.01


The new design of inchworm-type piezoelectric actuator is presented in this paper, Compared to conventional inchworm-type actuators, which are composed of more than three piezoelectric bodies, we can reduce the number of piezoelectric bodies by employing the proposed design, resulting in only one piezoelectric body. The overall size of the proposed actuator which consists of one piezoelectric body, two clamping parts and one extending part, is only $5{\times}6{\times}9 [mm^3]$ (DWL). The actuating characteristics of fabricated Monolithic Inchworm Type Actuator(MITA), were found to be a displacement of $0.3{\mu}m$, a generating force of 0.6N and an electric power of 0.5W.


  1. C. Niezrecki, D. Brei, S. Balakrishnan, and A. Moskalik, 'Piezoelectric actuation : State of the art', The Shock and Vibration Digest, Vol. 33, No. 4, p. 269, 2001
  2. P. E. Tenzer and R. Ben Mrad, 'On amplification in inchworm precision positioners', Mechatronics, Vol. 14, p. 515, 2004
  3. C. W. Moon, S. H. Lee, and J. K. Chung, 'A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback', Mechatronics, Vol. 16, p. 105, 2006