Study on the Generation of Leakage Current by the Fourier Transform Infrared Analysis

푸리에변환 적외선분광분석법에 의한 누설전류의 발생 원인에 대한 연구

  • Published : 2007.06.01


The surfaces of $SiO_2$ films were treated by PMMA diluted solutions, and analyzed the chemical shift from Fourier Transform Infrared Spectrometer. The $SiO_2$ film treated by PMMA diluted solution changed the properties of the surface, and showed the blue and red shift according to the concentration of PMMA. The C-H bond elongation effect due to the high electro-negative atom chlorine showed the red shift, and makes the final material with the cross-link structure. The leakage current was efficiently reduced at the sample No 7 with the red shift, witch depends on the electron deficient group.


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