한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)
- Volume 20 Issue 6
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- Pages.481-486
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- 2007
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- 1226-7945(pISSN)
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- 2288-3258(eISSN)
DOI QR Code
초소형 전자칼럼의 대면적 주사 적정조건
The Optimal Condition for Scanning Large Area with a Micro-electron-column
- 발행 : 2007.06.01
초록
In large area scanning with a micro-electron-column, the operating condition for the best resolution was investigated in factors of working distance and field of view. The resolution of a test sample was dependent on electron beam energy and scanning field size. The best resolution with single deflector was obtained at 300 V and 30 mm in the electron emitting tip voltage and a working distance, respectively. The scanning area at that condition was
파일
참고문헌
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E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, 'Experimental evaluation of a
$20{\times}20$ mm footprint microcolumn', J. Vac. Sci. & Technol., Vol. B14, No.6, p. 3792, 1996 - T. H. P. Chang, M. G. R. Thomson, E. Kraschmer, H. S. Kim, M. L. Yu, K. Y. Lee, S. A. Rishton, B. W. Hussey, and S. Zolgharnain, 'Electron-beam microcolumns for lithography and related applications', J. Vac. Sci. & Technol., Vol. B14, p. 3774, 1996
- E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, 'Sub-40 nm resolution 1 keV scanning tunneling microscope filed-emission microcolumn', J. Vac. Sci. & Technol., Vol. B12, p. 3503, 1994
- C. Stebler, T. Pfeer, U. Staufer, and N. F. de Rooji, 'Microfabricated double layer octupoles for microcolumn applications', Microelectronic Eng., Vol. 46, p. 401, 1999 https://doi.org/10.1016/S0167-9317(99)00118-5
- M. G. R. Thomson and T. H. P. Chang, 'Compression of field-emission angular distribution using a cathode shield', J. Vac. Sci. & Technol., Vol. B13, p. 2445, 1995
- E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, 'An electron-beam microcolumn with improved resolution, beam current, and stability', J. Vac. Sci. & Technol., Vol. B13, p. 2498, 1995
- 박종선, 장원권, 김호섭, '마이크로 전자렌즈의 광학적 정렬과 조립' 한국광학회지, 17권,4호, p. 216, 2006 https://doi.org/10.3807/KJOP.2006.17.4.354