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The Optimal Condition for Scanning Large Area with a Micro-electron-column

초소형 전자칼럼의 대면적 주사 적정조건

  • 박성순 (선문대학교 신소재과학과, 차세대반도체연구소) ;
  • 김호섭 (선문대학교 신소재과학과, 차세대반도체연구소) ;
  • 장원권 (한서대학교 컴퓨터응용물리학과)
  • Published : 2007.06.01

Abstract

In large area scanning with a micro-electron-column, the operating condition for the best resolution was investigated in factors of working distance and field of view. The resolution of a test sample was dependent on electron beam energy and scanning field size. The best resolution with single deflector was obtained at 300 V and 30 mm in the electron emitting tip voltage and a working distance, respectively. The scanning area at that condition was $13.9{\times}13.9mm^2$, linearly increased with the working distance. Double deflector was employed for larger scanning size without increasing working distance, but showed only 1.7 times larger than that of single deflector, and the resolution was inverse proportional to the scanning size.

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