Replica Polymer Mold for Economical Imprint Lithography

미세패턴 전사기법을 위한 저가형 고분자 복제 몰드

  • Lee, Min-Jung (Division of Nano Sciences and Department of Chemistry, Ewha Womans University) ;
  • Kim, Youn-Sang (Division of Nano Sciences and Department of Chemistry, Ewha Womans University)
  • 이민정 (이화여자대학교 나노과학부) ;
  • 김연상 (이화여자대학교 나노과학부)
  • Published : 2007.10.25

Abstract

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