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Preparation for Mn-Zn Ferrite Soft Magnetic Underlayer Perpendicular Magnetic Recording Disk using Mn-Zn-Fe-O Metal Target

Mn-Zn-Fe-O 금속타깃을 이용한 수직자기기록디스크의 하지연자성층용 Mn-Zn ferrite 박막제작

  • Published : 2006.09.01

Abstract

In order to attain high-rate deposition of Mn-Zn ferrite thin film for soft magnetic underlayer in perpendicular magnetic recording media, a reactive sputtering using powder-metal targets under the mixture gas of Ar and $O_{2}$ was performed. It was succeeded that Mn-Zn ferrite films with (111) crystal orientation were deposited on Pt(111) underlayer without any annealing process. The film revealed 3.4 kG of 4 ${\pi}Ms$, 70 Oe of coercivity. The deposition rate of the new method was 16 times as high as that of the conventional method using ferrite target.

References

  1. S. H. Kong, T. Okamoto, and S. Nakagawa, 'Fe-Co-B/Ni-Fe soft magnetic underlayer with high-saturation magnetization for perpendicular magnetic recording media', IEEE Trans. On Mag., Vol. 39, p. 2285, 2003 https://doi.org/10.1109/TMAG.2003.816273
  2. T. Tanaka, S. Yamamoto, H. Kurisu, and M. Matsuura, 'Eddy current effect in soft magnetic backlayer for PMR media', J. MMM., Vol. 287, p. 481, 2005
  3. N. Matsushita, J. Feng, N. Funabashi, S. Nakagawa, and M. Naoe, 'BaM/Pt multilayered films with fine grains and large perpendicular magnetic anisotropy for high density recording media', Journal of Applied Physics, Vol. 89, No. 11, p. 6837, 2001 https://doi.org/10.1063/1.1339859