Fabrication of Micromachined On-chip High Ratio Air Core Solenoid Inductor

MEMS에 의한 On-chip 고종횡비 Air Core Solenoid 인덕터의 제작

  • Published : 2006.08.01


We present high aspect ratio air-core solenoid inductors with $100{\mu}m\;and\;200{\mu}m$ tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor's radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor.


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