열처리온도에 따른 다이아몬드상 카본박막의 구조적 특성변화

Structural Variation of Diamond-like Carbon Thin Film According to the Annealing Temperature

  • 최원석 (성균관대학교 플라스마 응용 표면기술 연구센터) ;
  • 박문기 (LG. Philips LCD 선행기술1팀) ;
  • 홍병유 (성균관대학교 플라스마 응용 표면기술 연구센터)
  • 발행 : 2006.08.01


In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. We examined the effects of the post annealing temperature on the structural variation of the DLC films. The films were annealed at temperatures ranging from 300 to $900^{\circ}C$ in steps of $200^{\circ}C$ using RTA equipment in nitrogen ambient. The thickness of the film and interface between film and substrate were observed by surface profiler, field emission scanning electron microscopy (FESEM), high resolution transmission electron microscopy (HRTEM), respectively. Raman and X-ray photoelectron spectroscopy (XPS) analysis showed that DLC films were graphitized ($I_D/I_G$, G-peak position and $sp^2/sp^3$ increased) ratio at higher annealing temperature. The variation of surface as a function of annealing treatment was verified by a AFM and contact angle method.


  1. A. Grill, 'Diamond-like carbon: state of the art', Diam. Relat. Mater., Vol. 8, p. 428, 1999
  2. S. W. Glunz, A. Grohe, M. Hermle, M. Hofmann, S. Janz, T. Roth, O. Schultz, M. Vetter, I. Martin, R. Ferre, S. Bermejo, W. Wolke, W. Warta, R. Preu, and G. Willeke, 'Comparison of different dielectric passivation layers for application in industrially feasible high-efficiency crystalline silicon solar cells', Proc. 20th European Photovoltaic Solar Energy Conference, Barcelona, Spain, p. 572, 2005
  3. T. A. Friedmann, K. F. McCarty, J. C. Barbour, M. P. Siegal, and D. C. Dibble, 'Thermal stability of amorphous carbon films grown by pulsed laser deposition', Appl. Phys. Lett., Vol, 68, p. 1643, 1996
  4. 주병권, 정재훈, 김훈, 이상조, '몰리브덴 팁전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅 효과', 전기전자재료학회논문지, 11권, 7호, p. 508, 1998
  5. W. S. Choi, B. Y. Hong, Y. S. Jeon, K. H. Kim, and J. S. Yi, 'Synthesis and characterization of diamond-like carbon protective AR coating', J. Korean Phys. Soc., Vol, 45, p. S864, 2004
  6. R. O. Dillon, J. A. Woollam, and V. Katkanant, 'Use of raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films', Phys. Rev. B., Vol. 29, p. 3482, 1984
  7. Z. Tang, Z. J. Zhang, K. Narumi, Y. Xu, H. Naramoto, S. Nagai, and K. Miyashita, 'Effect of mass-selected ion species on structure and properties of diamond-like carbon films', J. Appl. Phys., Vol, 89, p. 1959, 2001
  8. J. W. Ager III, S. Anders, A. Anders, and L. G. Brown, 'Effect of intrinsic growth stress on the Raman spectra of vacuum-arc-deposited amorphous carbon films', Appl. Phys. Lett., Vol, 66, p. 3444, 1995
  9. D. Briggs and M. P. Seah, 'Practical surface analysis', 2/e, John Wiley & Sons Ltd, p. 119, 1990
  10. T. Y. Leung, W. F. Man, P. K. Lim, W. C. Chan, F. Gaspari, and S. Zukotynski, 'Determination of the $Sp^3/Sp^2$ ration of a-C:H by XPS and XAES', J. Non-Cryst. Solids., Vol. 254, p. 156, 1999
  11. S. Adachi, T. Arai, and K. Kobayashi, 'Chemical treatment effect of Si(111) surfaces in F -based aqueous solutions', J. Appl. Phys., Vol. 80, p. 5422, 1996
  12. I.-S. Bae, S.-H. Cho, S.-B. Lee, Y. Kim, and J.-H. Boo, 'Growth of plasma-polymerized thin films by PECVD method and study on their surface and optical characteristics', Surf. Coat. Tech., Vol. 193, p. 142, 2005
  13. X.-M. He, M. Hakovirta, and M. Nastasi, 'Structure and properties of fluorine and boron co-alloyed diamond-like carbon films', J. Phys.: Condens. Matter., Vol. 16, p. 8713, 2004

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