Structural Variation of Diamond-like Carbon Thin Film According to the Annealing Temperature

열처리온도에 따른 다이아몬드상 카본박막의 구조적 특성변화

  • 최원석 (성균관대학교 플라스마 응용 표면기술 연구센터) ;
  • 박문기 (LG. Philips LCD 선행기술1팀) ;
  • 홍병유 (성균관대학교 플라스마 응용 표면기술 연구센터)
  • Published : 2006.08.01


In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. We examined the effects of the post annealing temperature on the structural variation of the DLC films. The films were annealed at temperatures ranging from 300 to $900^{\circ}C$ in steps of $200^{\circ}C$ using RTA equipment in nitrogen ambient. The thickness of the film and interface between film and substrate were observed by surface profiler, field emission scanning electron microscopy (FESEM), high resolution transmission electron microscopy (HRTEM), respectively. Raman and X-ray photoelectron spectroscopy (XPS) analysis showed that DLC films were graphitized ($I_D/I_G$, G-peak position and $sp^2/sp^3$ increased) ratio at higher annealing temperature. The variation of surface as a function of annealing treatment was verified by a AFM and contact angle method.


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