A Study for Development and Characteristics of Electrostatic Eliminator Suitable for the Super Clean Room Less than Class 100(I)

공기 청정지역(Class 100 이하)에 적합한 정전기 제거장치의 개발 및 특성에 관한 연구(I) - LCD 제조 공정을 중심으로 -

  • Jung, Yong-Chul (Department of Safety Engineering, Graduate School, Pukyong National University) ;
  • Park, Hoon-Kyu (Gori Nuclear Power Plant at KECO) ;
  • Lee, Dong-Hoon (Department of Safety Engineering, Pukyong National University)
  • 정용철 (부경대학교 대학원 안전공학과) ;
  • 박훈규 (한국전력 고리원자력 발전소) ;
  • 이동훈 (부경대학교 안전공학부)
  • Published : 2006.08.31

Abstract

It is a well known fact that LCD is a central part of the IT industry which is important in the present and the future. But the biggest problem of LCD manufacturing is maintaining a cleaning room environment and administration. Therefore the purpose of this study is to first, prevent the yield depreciation and damage of products, and second, protect the worker ftom accidental electrostatic discharge during LCD manufacture. The soft x-ray ionizer is a type of electrostatic reducer device. It protects against electrostatic discharge in the cleaning room environment and is a necessary environmental factor during LCD production. The positive aspects of the soft x-ray are its shorter time and wider angle of exposure. But the negative aspect of the soft x-ray is its need for several shielding of protection from the harmful x-ray exposure. On this study, the development of the Air Nozzle-type ionizer to amend and refine some problems. For example, examined the electrostatic reduce device of a soft x-ray type and discovered the ion did not go inside well. also workers to be free from danger. An Air Nozzle-type ionizer is comprised of soft x-ray radiation and ionized air production. Air is injected through the nozzle after being ionized from radiation. It supplies air keeping the same pressure into the end foundation of ion production. The soft x-ray is the structure which radiates ionized air through the nozzle (21 holes) having micro holes of the ionizable radiation after ionizing the inside air by the ion production. A worker does not need a cover to protect against x-rays and the Air Nozzle-type ionizer is easy to set up and is more effective at eliminating electrostatic.

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