The comparative algorithm of the design data in the photomask inspection machine with high resolution

Photomask 고해상도 검사기에서 설계 데이터 비교 알고리즘

  • Published : 2006.08.25

Abstract

Three categories such as the design of a machine, control and software are necessary in the development of the photomask inspection machine with high resolution. Among them, the design of a software detects inferiority through the comparison of CAD data and real data read by camera from photomask. The block matching algorithm is used since the domain is large and the comparison of data by pixel is accomplished. To correct the error arising from the assembly of a machine, calibration algorithm is used and prefocusing algorithm is suggested to correct the surface of the photomask.