p-Toluenesulfonate Ester Derivatives of Benzendiol as Novel Acid Amplifiers

새로운 산증식제로 벤젠다이올의 p-톨루엔술폰산 에스터 유도체에 관한 연구

  • 강지은 (부경대학교 공과대학 화상정보공학부) ;
  • 홍경일 (한국화학연구원 복합기능환경소재팀) ;
  • 임권택 (부경대학교 공과대학 화상정보공학부) ;
  • 정연태 (부경대학교 공과대학 화상정보공학부)
  • Received : 2005.04.12
  • Accepted : 2005.08.01
  • Published : 2005.10.10


Aiming the development of novel acid amplifiers, 2-hydroxyphenyl-4-methylbenzenesulfonate (1), 3-hydroxyphenyl-4-methylbenzene sulfonate (2), 4-hydroxyphenyl-4-methylbenzenesulfonate (3) were synthesized as the aromatic acid amplifiers with good thermal stability. They were autocatalytically generated p-toluenesulfonic acid in the presence of small amount of acid evolved from a photoacid generator. These aromatic sulfonates showed excellent thermal stability in PtBMA film and were proven to be the first aromatic acid amplifier to act as a photosensitivity enhancer. When these compounds were coupled with a chemically amplified photoresist system, photosensitivity was enhanced up to 3~6 folds.


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