Effect of Bias Voltage of Influenced on a Property of Electrical and Optical of ZnO:Al

ZnO:Al 박막의 전기적, 광학적 특성에 미치는 바이어스 전압효과

  • 나영일 (군산대학교 전자정보공학부) ;
  • 이재형 (군산대학교 전자정보공학부) ;
  • 임동건 (충주대학교 전자공학과) ;
  • 양계준 (충주대학교 전자공학과)
  • Published : 2005.06.01


Al doped Zinc Oxide, which is widely used as a transparent conductor in opto-electronic devices. In this paper, we find that the lateral variations of the parameters of the ZnO:Al films prepared by the rf magnetron sputtering can be reduced to acceptable levels by optimising the deposition parameters. The effect of bias voltage on the electrical, optical and morphological properties were investigated experimentally. we investigated sample properties of Bias Voltage change in 0 to 50 V.


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