InfluenceofPre-TreatmentontheFormationofOrderedNano-SizedPoresFabricatedbyAluminumAnodizationMethod

전처리공정이알루미늄얌극산화법에의해제조된규칙적인나노급미세기공의형성에미치는영향

  • 이재홍 (순천향대공대전기공학과) ;
  • 이병욱 (순천향대공대전기공학과) ;
  • 김창교 (순천향대공대전기공학과) ;
  • 홍진수 (순천향대자연대물리학과)
  • Published : 2005.06.01

Abstract

Nano-sizedporearrayswerepreparedbytheself-organizationprocessesoftheanodicoxidationusingthealuminumplatewith99.999$\%$purity.Sincethealuminumplatehasaroughsurface,thealuminumplateof1mmthicknesswasanodizedafterthepre-treatmentsofpressing,mechanicalpolishing,thermaloxidation,chemicalpolishing,andelectrochemicalpolishing.Thediameterofthenano-sizedporesandthethicknessofbarrierlayercanbecontrolledbyappliedvoltage.Thethicknessofaluminamembranecanalsobecontrolledbytheanodizingcurrent.Thenano-sizedporeswithdiameterof60$\~$120nm,thedistancebetweenthenearestporesof30$\~$60nm,andthethicknessof6$\~$7Wwereobtainedbytheanodicoxidationprocess.Theporewideningprocesswasemployedforobtainingtheone-channelwithflatsurfacebecausetheporesofthealuminamembranepreparedbythefixedvoltagemethodshowsthestructureoftwo-channelwithroughsurface.

Keywords

AluminumOxideAnodizatio;ChemicalPolishing;ElectrochemicalPolishing;Pre-treatment;Nano-SizedPore;PoreWidening

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