The diffusion model, which considers diffusion and sorption, is proposed. The FEM program developed on the basis of the diffusion model provides the estimation of chloride concentration according to cyclic humidity and sorption. After the humidity diffusion analysis is carried out, the chloride ion diffusion and sorption analysis are conducted on the basis of the preestimated humidity data in each element. Each element has different analysis variables at different ages and locations. At early ages, the difference between inner and outer relative humidity causes the chloride ion penetration by sorption. As the humidity diffusion reduces the difference with age, the effect of sorption on the chloride ion penetration decreases. By the way, the cyclic humidity increases the effect of sorption on the chloride ion penetration at early ages, and the quantity of chloride ion around steel at later ages. Therefore, the in situ analysis of chloride ion penetration for marine concrete structures must be performed considering the cyclic humidity condition and the long term sorption.