A Dynamic Structural Design of PC type Sub-Structure for Next-Generation FAB based on Dynamic Test and Simulation

차세대 반도체 FAB의 동적 구조 설계를 위한 PC형 격자보 구조물의 동적 특성 평가

  • 전종균 (선문대학교 기계공학부) ;
  • 김강부 (알엠에스테크놀러지(주)) ;
  • 손성완 (알엠에스테크놀러지(주)) ;
  • 이홍기 (알엠에스테크놀러지(주))
  • Published : 2004.12.01


In the design stage of high precision manufacturing/inspection FAB facilities, it is necessary to investigate the allowable vibration limits of high precision equipments and to study structural dynamic characteristics of C/R and Sub-structure in order to provide structural vibration criteria to satisfy these allowable limits. The goal of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next generation TFT-LCD FAB through experiments and analysis procedures. Therefore, in order to provide a proper dynamic structural design for high precision manufacturing/inspection work process, these allowable limits must be satisfied.