Characteristics of AC Hot-carrier-induced Degradation in nMOS with NO-based Gate Dielectrics

NO기반 게이트절연막 NMOS의 AC Hot Carrier 특성

  • 장성근 (청운대학교 전자공학과) ;
  • 김윤장 (하이닉스 반도체 시스템IC 연구소)
  • Published : 2004.06.01


We studied the dependence of hot-tarrier-induced degradation characteristics on nitrogen concentration in NO(Nitrided-Oxide) gate of nMOS, under ac and dc stresses. The $\Delta$V$_{t}$ and $\Delta$G$_{m}$ dependence of nitrogen concentration were observed, We observed that device degradation was suppressed significantly when the nitrogen concentration in the gate was increased. Compared to $N_2$O oxynitride, NO oxynitride gate devices show a smaller sensitivity to ac stress frequency. Results suggest that the improved at-hot carrier immunity of the device with NO gate may be due to the significantly suppressed interface state generation and neutral trap generation during stress.ess.


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