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Fabrication and Properties of MI Sensor Device using CoZrNb Films

CoZrNb막을 이용한 MI센서 소자의 제작 및 특성

  • 허진 (동아대학교 전기전자컴퓨터공학부) ;
  • 김영학 (부경대학교 전기공학과) ;
  • 신광호 (경성대학교 멀티미디어공학과) ;
  • 사공건 (동아대학교 전기전자컴퓨터공학부)
  • Published : 2004.01.01

Abstract

Magneto-Impedance(MI) sensor is a highly sensitive sensor, which was able to detect a weak geomagnetic field. It also has a merit to be able to build in the low power system. In this study, their magnetic permeability and anisotropy field(H$\sub$k/) as a function of some different thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ respectively for 2 hours. Magnetic properties of films are measured by using a M-H loop tracer. Magnetic permeability of a film is measured over the frequency range from 1 ㎒ to 750㎒. By thickening a CoZrNb film relatively, magnetic permeability and impedance are examine to design the. MI sensor which drives at 50㎒, and thereof fabricated the MI sensor which drives at the 50㎒.

References

  1. Appl. Phys. Lett. v.65 no.9 Magneto-impedance effect in amorphous wires L.V.Panina;K.Mohri https://doi.org/10.1063/1.112104
  2. IEEE Trans. Magn. v.28 no.5 Magneto-Inductive effect (MI effect) in amorphous wires K.Mohri;T.Kohzawa;K.Kawashma;H.Yoshida;L.V.Panina https://doi.org/10.1109/20.179741
  3. J. Appl. Phys. v.79 no.8 The field-annealing effect on magnetoimpedance of a zero magnetostrictive metallic glass S.U.Jen;Y.D.Chao
  4. Appl. Phys. Lett. v.67 no.6 Role of magnetic anisotropy in the magneto-impedance effect in amorphous alloys R.L.Sommer;C.L.Chien https://doi.org/10.1063/1.115528
  5. IEEE Trans. Magn. v.33 no.5 Micro magnetic thin-film sensor using LC resonance M.Takezawa;H.Kikuchi;K.Ishiyama;M.Yamaguchi;K.I.Arai https://doi.org/10.1109/20.617957
  6. IEEE Trans. Magn. v.34 no.4 High frequency carrier type bridge-connected magnetic field sensor M.Takezawa;H.Kikuchi;K.Suezawa;M.Yamaguchi;K.Ishiyama;K.I.Arai https://doi.org/10.1109/20.706535
  7. J. Appl. Phys. v.52 no.2 Amorphous FeCo-SiB alloys with zero magneto-striction O.Kumoto;K.Ohya https://doi.org/10.1063/1.328778
  8. IEEE Trans. Magn. v.13 no.2 Magnetic anneal anisotropy in amorphous alloys F.E.Luborsky;J.L.Walter https://doi.org/10.1109/TMAG.1977.1059494
  9. J. Appl. Phys. v.79 no.8 Annealing and geometric effects in the magneto-impedance of amorphous $Co_{70.4}Fe_{4.6}Si_{15}B_{10}$ alloys R.L.Sommer;C.L.Chien;R.Hasegawa https://doi.org/10.1063/1.362106
  10. IEEE Trans. Magn. v.30 no.6 A new microstrip pickup coil for thin-film permeance meters T.Kawazu;M.Yamaguchi;K.I.Arai https://doi.org/10.1109/20.334176
  11. IEEE Trans. Magn. v.33 no.5 A new 1 MHz-2 GHz permeance meter for metallic thin films M.Yamaguchi;S.Yabukami;K.I.Arai https://doi.org/10.1109/20.619516
  12. 한국재료학회지 v.8 no.3 FeCosiB계 아몰퍼스 자성방막의 자기-임피던스 효과 신용진;소대화;김현욱;김대주;서강수