Optical E-H Transition Properties of Inductively Coupled Plasma with Ar Gas Pressure and RF Pourer

Ar 가스 압력과 RF 전력변화에 따른 유도결합형ㆍ플라즈마 E-H모드 변환의 광학적 특성

  • 허인성 (원광대학교 전기전자 및 정보공학부) ;
  • 조주웅 (원광대학교 전기전자 및 정보공학부) ;
  • 이영환 (원광대학교 전기전자 및 정보공학부) ;
  • 김광수 (원광대학교 전기전자 및 정보공학부) ;
  • 최용성 (원광대학교 전기전자 및 정보공학부) ;
  • 박대희 (원광대학교 전기전자 및 정보공학부)
  • Published : 2004.01.01

Abstract

In this paper, the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber, a RF power of 13.56 [MHz] was applied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar I line, luminance were investigated. At this time, the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10∼60 [mTorr], 10∼300 [W], respectively. From emission intensity and lumnance intensity results, the mode transition from E-mode to H-mode was observed. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp.

Keywords

Electrodeless fluorescent lamp;Inductively coupled plasma;RF power;Emission intensity

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