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Design and fabrication of film Bulk Acoustic Resonator for flexible Microsystems

Flexible 마이크로시스템을 위한 압전 박막 공진기의 설계 및 제작

  • 강유리 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 김용국 (한국과학기술연구원 마이크로시스템연구센터) ;
  • 김수원 (고려대학교 전자컴퓨터공학과) ;
  • 주병권 (한국과학기술연구원 마이크로시스템연구센터)
  • Published : 2003.12.01

Abstract

This paper reports on the air-gap type thin film bulk acoustic wave resonator(FBAR) using ultra thin wafer with thickness of 50$\mu\textrm{m}$. It was fabricated to realize a small size devices and integrated objects using MEMS technology for flexible microsystems. To reduce a error of experiment, MATLAB simulation was executed using material characteristic coefficient. Fabricated thin FBAR consisted of piezoelectric film sandwiched between metal electrodes. Used piezoelectric film was the aluminum nitride(AlN) and electrode was the molybdenum(Mo). Thin wafer was fabricated by wet etching and dry etching, and then handling wafer was used to prevent damage of FBAR. The series resonance frequency and the parallel frequency measured were 2.447㎓ and 2.487㎓, respectively. Active area is 100${\times}$100$\mu\textrm{m}$$^2$.Q-factor was 996.68 and K$^2$$\_$eff/ was 3.91%.

References

  1. Ph. D Thesis, Dept. of Electrical engineering and Computer Science, Masachusetts Institute of Technology A sealed cavity thin-film acoustic resonator process for RF bandpass filters J.J.Lutsky
  2. IEEE ultrasonics symposium Thin film bulk acoustic resonators(FBAR) for wireless applications R.C.Ruby;P.Bradley(SM);Y.Oshmyansky;A.Chien
  3. Principles of Acoustic Devices V.M.Ristic
  4. Microwave Symposium Digest, IEEE MTT-S International Film bulk acoustic wave resonator and filter technology S.V.Krishnaswamy;J.F.Rosenbaum;S.S.Horwitz;R.A.Moore
  5. IEEE Transactions of Microwave Theory and Techniques v.41 High-Q microwave acoustic resonators and filters K.M.Lakin;G.R.Kline;K.T.McCarron https://doi.org/10.1109/22.260698
  6. 2001 Radio and Wireless Conf., RAWCON of IEEE Thin film bulk acoustic resonator and filter technology K.M.Lakin;K.T.McCarron;J.Belsick;J.F.McDonald
  7. Jpn. J. Appl. Phys. v.39 Analysis of piezoelectric thin film resonators with acoustic quarter-wave multilayers H.Kanbara;H.Kobayashi;K.Nakamura https://doi.org/10.1143/JJAP.39.3049
  8. 전기전자재료학회논문지 v.15 no.12 센서 기능성 박막 : SOI 웨이퍼를 이용한 압전박막공진기 제작 김인태;박윤권;이시형;이윤희;이전국;김남수;주병권
  9. 2001 Solid State circuits Conf., IEEE Internation Ultra-miniature high-Q filters and duplexers using FBAR technology R.Ruby;P.Bradley;J.Larson;Y.Oshmyansky;D.Figueredo
  10. Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on v.49 Thin film bulk acoustic wave filter M.Ylilammi;J.Ella;M.Partanen;J.Kaitila https://doi.org/10.1109/58.996574
  11. IEEE Ultrasonics Symposium v.1 Modified Butterworth-Vam Dyke circuit for FBAR resonators and automated measurement system J.D.Larson;P.D.Bradley;S.Wartenberg;R.C.Ruby