Piezoelectric-Actuated Polydimethylsiloxane(PDMS) Micropump with Diffusers

압전 구동 방식의 Polydimethylsiloxane(PDMS) 마이크로 펌프

  • 김진호 (명지대 전기공학과) ;
  • 김영호 (수원대 전자재료공학과) ;
  • 김용상 (명지대 전기공학과)
  • Published : 2003.10.01


The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.


micropump;PDMS;piezoelectric disc;diffuser;deflection;flow rate


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