Development of Electronic Compass Using 2-Axis Micro Fluxgate Sensor

2축 마이크로 플럭스게이트 센서 제작을 통한 전자 나침반 개발

  • 박해석 (삼성종합기술원, MEMS Lab.) ;
  • 심동식 (삼성종합기술원, MEMS Lab.) ;
  • 나경원 (삼성종합기술원, MEMS Lab.) ;
  • 황준식 (삼성종합기술원, MEMS Lab.) ;
  • 최상언 (삼성종합기술원, MEMS Lab.)
  • Published : 2003.09.01


This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.


fluxgate;magnetic sensor;electroplating;permalloy


  1. 최원열, 황준식, 강명삼, 최상언, '폐자로를 형성한 마이크로 플럭스게이트 자기 센서', Journal of the Microelectronics & Packaging Society, Vol. 9, No. 3, p. 19, 2002
  2. P. Ripka, S. Choi, S. Kawahito, A. Tipek and M. Ishida, 'Micro-fluxgate sensor with double sided core', EMSA 2000(Third European Conference on Magnetic Sensors and Actuators), Dresden, p. 167, 2000
  3. O. Dezuari, E. Belloy, S. Gilbert and M. Gijs, 'New hybrid technology for planar fluxgate sensor fabrication', IEEE Transducers on Magnetics, Vol. 35, No. 4, p. 2111, 1999
  4. O. Dezuari, E. Belloy, S. Gilbert and M. Gijs, 'Printed circuit board integrated fluxgate sensor', Sensors and Actuators, Vol. 81, p. 200, 2000
  5. Y. Tamura, 'Weak-field magnetic field sensor having etched circuit coils', US Patent No.5936403A, 1999
  6. R. Gottfried-Gottfried, W. Budde, R. Jahne, H. Kuck and B. Sauer, S.Ulbricht and U. Wende, 'A miniaturized magnetic field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry', Transducers 95, Eurosenser IX, p. 249, 1995
  7. S. Choi, S. Kawahito, K. Takahashi, Y. Matsumato, M. Ishida and Y. Tadokoro, 'A planar flusgate magnetic sensor for on-chip integration', Sensors and Materials, Vol. 9, No. 4, p. 241, 1997
  8. T. Liakopoulos and C. Ahn, 'A micro-fluxgate magnetic sensor using micromachined planar solenoid coils', Sensors and Actuators, Vol. 77, p. 66, 1999
  9. S. Kawahito, H. Sato, M. Sutoh and Y. Tadokoro, 'High-resolution micro fluxgate sensing elements using closely coupled coil structures', Sensors and Actuators A, Vol. 54, p. 612, 1996
  10. T. Seitz, 'Fluxgate sensor in planar microtechnology', Sensors and Actuators A, Vol. 21, p. 799, 1990
  11. S. Kawahito, Y. Sasaki, M. Ashiki and T. Nakamura, 'Micromachined Solenoids for Highly Sensitive Magnetic Sensor', The 6th Int. Conf. Solid-State Sensors and Actuators, p. 1077, 1991
  12. F. Primdahl and R. Coles, 'A bibliography of magnetometers', Appendix 1. Proc. Int. Workshop on Magnetic Observatory Instruments, Ottawa, Canada, July 30-Aug. 9, 1986
  13. P. Ripka, 'Review of fluxgate sensors', Sensors and Actuators A, ZVol. 33, p. 129, 1992
  14. H. Thomas, 'Direction responsive system', US Patent, No. 2016977, 1935
  15. F. Primdahl, 'The fluxgate mechanism', IEEE Trans. on Magnetics, Vol. 6, p. 376, 1970
  16. F. Primdahl, 'The fluxgate magnetometer', J. Phys. E: Sci. Instrum., Vol.12, p. 241, 1979
  17. Journal of the Microelectronics & Packaging Society v.9 no.3 폐자로를 형성한 마이크로 플럭스게이트 자기 센서 최원열;황준식;강명삼;최상언