The Deposition and Properties of Surface Textured ZnO:Al Films

표면 텍스쳐된 ZnO:Al 투명전도막 증착 및 특성

  • 유진수 (성균관대학 정보통신공학부) ;
  • 이정철 (한국에너지기술연구원) ;
  • 김석기 (한국에너지기술연구원) ;
  • 윤경훈 (한국에너지기술연구원) ;
  • 박이준 (한국에너지기술연구원) ;
  • 이준신 (성균관대학 정보통신공학부)
  • Published : 2003.09.01

Abstract

Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCI (0.5%) to examine the electrical and surface morphology properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure md the substrate temperature. In low pressures (0.9mTorr) and high substrate temperatures ($\leq$$300^{\circ}C$), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells.

Keywords

TCO(transparent conductive oxide);ZnO:Al;Thin film solar cells;Light trapping;rf magnetron sputtering

References

  1. E. Krikorian, R.J. Sneed, J. Appl. Phys. 37 (1966) 3655 https://doi.org/10.1063/1.1707902
  2. O. Kluth, B. Rech, H. Wagner, Proceedings of the 17th European Photovoltaic Solar Energy Conference, Munich, Germany, 2001, p. 2032
  3. K. H. Kim, K. C. Park, D. Y. M. J. Appl. Phys. 81 (12) (1997) 7764 https://doi.org/10.1063/1.365556
  4. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schope, C. Beneking, H. Wagner, A. Loffl, H. W. Schock, Thin Solid Films, 351 (1999) 247 https://doi.org/10.1016/S0040-6090(99)00085-1
  5. J. H. Lan, J. Kanicki, A. Catalano, J. Keane, Proceedings of the Second IEEE International Workshop on Active Matrix Liquid Crystal Displays, New York, 1995, p. 54 https://doi.org/10.1109/AMLCD.1995.540959
  6. B. Rech, S. Wieder, C. Beneking, A. Loffl, O. Kluth, W. Reetz, H. Wagner, Proceedings of the 26th IEEE Phothvoltaic Specialists Conference, Anaheim, 1997, p. 619
  7. S. Bose, A. K. Barua, J. Phys. D: Appl. Phys, 32 (1999) 213 https://doi.org/10.1088/0022-3727/32/3/006
  8. A. Loffl, S.Wieder, B. Rech, O. Kluth, C. Beneking, H. Wagner, Proceedings of the 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997, p. 2089