Influence of Pd Contents and Substrate Temperature on the Magnetic Property in Co1-xPdx Films

Co1-xPdx 합금의 Pd함량과 스퍼터 기판온도에 따른 자기적 특성 변화

  • 이기영 (서울시립대학교 신소재공학과) ;
  • 송오성 (서울시립대학교 신소재공학과)
  • Published : 2003.08.01


Co-Pd alloy thin films prepared by a DC-sputter that have self-organized nano structure(SONS), are promising for high-density information storage media in information era. We prepared the samples by varying Pd contents of 0~8.1 wt% at the substrate temperatures of room temperature (RT) and 200 $^{\circ}C$, respectively Microstructure and Pd contents of the Co$_{1-x}$ Pd$_{x}$ films are probed by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and an energy dispersive spectrometer (EDS). We also investigated the saturation magnetization (Ms), remanence and coercivity of the Co$_{1-x}$ Pd$_{x}$ films. Surface roughness are measured by an atomic force microscope (AFM). We revealed that self-organized nano size Co-enriched phase and Pd-enriched phase existed with Pd contents at the substrate temperatures of RT and 20$0^{\circ}C$ through microstructure characterization. SONS helped to keep the saturation magnetization and enhance the perpendicular anisotropy with Pd contents. Out result implies that we may tune the perpendicular magnetic properties with keeping the saturation magnetization by varying substrate temperatures and Pd contents for high density magnetic recording.rding.


  1. Journal of Magnetism and Magnetic Material v.193 Co-Pd alloy films for magneto-optical recording E.Ganshina;V.Guschin;I.Romanov;A.Skobelev;A.Tselev
  2. 전기전자재료학회논문지 v.6 no.1 광자기기록 재료의 물성과 개발현황 최영준
  3. Microelectronic Engineering v.53 no.67 Fabrication of patterned media for high density magnetic storage C.A.Loss;H.I.Smith;T.S.Schatternburg;M.Farhoud;M.Hwang;M.Walsh;M.C.Abraham;R.J.Ram
  4. Chem. Mater. v.13 Fabrication of the Multilayered Nanostructure of Alternating Polymers and Gold Nanoparticles with Thin Films of Self-Assembling Diblock Copolymers B.H.Sohn;B.H.Seo
  5. Korean Journal of Materials Research v.11 no.12 Magnetic property evolution of Co-22%Cr Alloy thin films Ohsung Song;Youngmin Lee
  6. 전기전자재료학회논문지 v.15 no.9 기판온도와 Pd조성에 대한 Co-Cr-Pd자성 합금박막에서의 자기적 특성 송오성;이기영
  7. Jpn. J. Appl. Phys. v.24 TEM observation of microstructure in sputtered CoCr Film Y.Maeda;S.Hirano;M.Asahi
  8. 투과전자현미경학 개론 성창모
  9. 한국열처리공학회 v.6 no.4 TiN박막 성장거동에 미치는 증착온도의 영향 이인우;남옥현;김문일
  10. 전기전자재료학회논문지 v.12 no.9 증착온도에 따른 $(Sr_{0.85}Ca_{0.15})TiO_{3}$ 박막의 미세구조 및 전기적 특성 김진사;신철기;최운식;김충혁;이준웅
  11. 二元合金狀態圖潗 S.Nagasaki;H.Makodo
  12. J. of Magn. and Mag. Materials v.212 Infulence of third elements on the anisotropic magnetoresistance in permalloy films H.Nagura;K.Saito;K.Takahashi;H.Fujimori