Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

A Study or the Crystallographic Properties or ZnO/SiO2/Si Thin Film for FBAR

FBAR용 ZnO/SiO2Si 박막의 결정학적 특성에 관한 연구

  • 금민종 (경원대학교 전기정보공학과) ;
  • 손인환 (신성대학 전기과) ;
  • 최명규 (경원전문대학 전기제어시스템과) ;
  • 추순남 (경원전문대학 전기제어시스템과) ;
  • 최형욱 (경원대학교 전기정보공학과) ;
  • 신영화 (경원대학교 전기정보공학과) ;
  • 김경환 (경원대학교 전기정보공학과)
  • Published : 2003.08.01

Abstract

In this study, we prepared ZnO/glass and ZnO/SiO$_2$/Si thin film by Facing Targets Sputtering (FTS) system for Film Bulk Acoustic Resonator (FBAR). When the ZnO thin film applied to piezoelectric thin film, it requires good c-axis preferred orientation. And c-axis orientation has a remarkable difference with preparation conditions. Therefore, c-axis orientation must be significantly evaluated as a function of deposition conditions. Moreover, in order to prepare ZnO thin film with good crystallographic properties and progressive of efficiency of product process, the ZnO thin film should be prepared as low temperature as possible. In this work, we prepared ZnO thin films on slide glass and SiO$_2$/Si substrate. And the crystallographic characteristics of ZnO thin films on sputtering conditions were investigated by alpha-step and X-ray diffraction.

Keywords

File

Download PDF

References

  1. 전기전자재료학회 논문지 v.15 no.9 RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구 최형욱;김경환;김상종;강종윤;안병국;윤석진 https://doi.org/10.4313/JKEM.2002.15.9.798
  2. 전기전자재료학회 논문지 v.14 no.6 RF 마그네트론 스러터링에 의한 ZnO 박막 SAW필터에 관한 연구 박용욱;신현용;박정흠;강종윤;심성훈;최지원;윤석진;김현재;김경환;최형욱
  3. IEEE MTT-S Digest Film bulk acoustic wave resonator and filter technology S.V.Krishnaswamy;J.F.Rosenbaum;S.S.Horwitz;R.A.Moore
  4. Vacuum v.59 no.538 Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering Y.Yoshino;T.Makino;Y.Katayama;T.Hata
  5. Thin Solid Films v.137 ZnO processing for integrated optic sensors W.H.G.Horsthuis https://doi.org/10.1016/0040-6090(86)90018-0
  6. Applied Surface Science v.169 no.170 Thin film properties by facing targets sputtering system K.H.Kim;S.H.Kong;M.J.Keum;I.H.Son;M.Naoe;S.Nakagawa
  7. 전기전자재료학회 논문지 v.11 no.5 대향타겟식 스퍼터링에 의한 Co-Cr 박막의 제작 김경환;금민종;손인환;공석현;최성인