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Gas Sensing Characteristics and Doping Effect of MoO3Thin Films Sensor

박막형 MoO3가스센서의 가스 감지 특성 및 첨가물의 영향

  • 황종택 (충북대학교 재료공학과) ;
  • 장건익 (충북대학교 재료공학과) ;
  • 윤대호 (성균관대학교 금속재료공학부)
  • Published : 2003.08.01

Abstract

MoO$_3$thin films were deposited on electrode of alumina substrates in $O_2$atmosphere by RF reactive sputtering using molybdenum metal target. The deposition was performed at 30$0^{\circ}C$ with 350 W of a forward power in an Ar-O$_2$atmosphere. The working pressure was maintained at 3$\times$10$^{-2}$ torr and all deposited films were annealed at 50$0^{\circ}C$ for 5 hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by using a XRD. To investigate gas sensing characteristics of the doped MoO$_3$thin film, Co, Ni and Pt were used as dopants. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as H$_2$, NH$_3$and CO at optimum working temperature. Co-doped MoO3 thin film shows the maximum 46.8 % of sensitivity in NH$_3$ and Ni-doped MoO$_3$thin film exhibits 49.7 % of sensitivity in H$_2$.

References

  1. 전기전자재료학회논문지 v.9 no.1 결정성장 억제재를 첨가한 SnO₂미세입자의 메탄가스 감지효과 홍영호;강봉휘;이덕동
  2. 전기전자재료학회논문지 v.9 no.8 ZnO와 ZnO - CuO 후막의 일산화탄소 감응특성 전석택;최우성
  3. 전기전자재료학회논문지 v.11 no.4 SnO₂의 가스 감응 특성에 미치는 첨가물 SiO₂의 영향 최우성;김태원;정승우
  4. Sensors and Actuators v.B1 Thick film carbon gas sensors D.D.Lee;D.H.Choi
  5. Sensors and Actuators B v.13-14 A study of the sensing characteristics of $Fe_{2}O_{3}$ gas-sensing thin film J.Peng;C.C.Chai
  6. Matsushita National Tech. Report No.24 $γ-Fe_{2}O_{3}$ Ceramic gas sensor M.Natsuoka;Y.Nakatani;H.Ohidom
  7. Sensors and Actuators v.B23 Recent development in semiconducting thin-film gas sensors G.Sberveglieri
  8. Thin Solid Film v.307 Characterization of a molybdenum oxide sputtered thin film as a gas sensor M.Ferroni;V.Guiidi;G.Martinelli https://doi.org/10.1016/S0040-6090(97)00279-4
  9. Sensors and Actuators v.B21 $MoO_{3}/TiO_{2} and Bi_{2}MoO_{6}$ sensors A.Raju;C.Rao
  10. Chem. Physics. Lett. v.29 Trapped electrons in substoichiometric MoO₃Observed by X-ray electron spectroscopy J.W.Rabalais;R.J.Colton https://doi.org/10.1016/0009-2614(74)80149-1