The Structural Characteristic and Surface Morphology of ZnO Thin Films by Pulsed Laser Deposition

PLD를 이용한 ZnO 박막의 구조적 특성과 표면의 형태에 관한 연구

  • Kim, Jae-Hong ;
  • Lee, Kyoung-Cheol ;
  • Lee, Cheon
  • 김재홍 (인하대학교 전기공학과) ;
  • 이경철 (인하대학교 전기공학과) ;
  • 이천 (인하대학교 전기공학과)
  • Published : 2003.06.01

Abstract

ZnO thin films on (100) p-type silicon substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. The influence of the deposition parameters, such as oxygen pressure, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiments were performed for oxygen gas flow rate of 100~700 sccm and substrate temperatures in the range of 200~$500^{\circ}C$. We investigated the structural and morphological properties of ZnO thin films using X-ray diffraction(XRD), scanning electron microscopy(SEM) and atomic force microscopy(AFM).

Keywords

ZnO;Pulsed Laser Deposition(PLD);Nd:YAG laser;(100) p-type silicon

References

  1. 김영진,권오준, '고주파 마그네트론 스퍼터링법으로 제조한 ZnO박막의 기판에 따른 효과', 센서학회지, 제5권, 제6호, pp. 66-73, 1996
  2. C. Kittel, 'Introduction to Solid State Physics', John Wiley and Sons, New York, 7th ed. p. 58, 1996
  3. H.Z. Wu, KM. He, 'Low-temperature epitaxy of ZnO films on Si (001) and silica by reactive e-beam evaporation,' Journal of crystal growth, pp. 131-137, 2000 https://doi.org/10.1016/S0022-0248(00)00397-3
  4. Young-Jin Kim, Hyeong-Joon Kim, 'Trapped oxygen in the grain boundaries of ZnO polycrystalline thin films prepared by plasma-enhanced chemical vapor deposition,' Materials letters, pp. 159-163, 1999 https://doi.org/10.1016/S0167-577X(99)00124-X
  5. 강정석, '분위기 산소압 변화에 따른 ZnO 박막의 발광 특성 변화' 한국전기전자재료학회 (2001)
  6. Zhai. Jiwei, Zhang Liangying, 'The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol gel process,' Ceramics international, pp. 883-885, 2000 https://doi.org/10.1016/S0272-8842(00)00031-6
  7. T. Garcia, E. de Posada, 'Textured strontium ferrite thin films grown by PLD,' Materials letters, pp. 294-298, 2001 https://doi.org/10.1016/S0167-577X(00)00387-6
  8. Y.R. Ryu, S. Zhu, 'ZnSe and ZnO film growth by pulsed laser deposition,' Applied surface science, pp. 127-129, 1998 https://doi.org/10.1016/S0169-4332(97)00681-8
  9. S. H. Bae, S. Y. Lee, 'Pulsed laser deposition of ZnO thin films for application of light emission,' applied surface science, pp. 458-461, 2000
  10. S. King, B.C. Khanra, 'Influence of Hydrogen Chemisorption on the Surface Composition of Pt-Rh/ A1203Catalysts,' Journal of Catalysis, pp. 277-283, 1996
  11. B.S. Li, Y.C. Liu, 'The photoluminescence of ZnO thin films grown on Si (100) substrate by plasma-enhanced chemical vapor deposition,' Journal of crystal growth, pp. 479-483, 2002 https://doi.org/10.1016/S0022-0248(02)00929-6
  12. Zhuxi Fu, Bixia Lin, 'Photoluminescence and structure of ZnO films deposited on Si substrates by metal-organic chemical vapor deposition,' Thin solid f 0ms, pp. 302-306, 2002 https://doi.org/10.1016/S0040-6090(01)01363-3
  13. A. Miyake, H. Kominami, 'Luminescent properties of ZnO thin films grown epitaxially on Si substrate,' Journal of crystal growth, pp. 294-298, 2000
  14. V. Craciun, S. Amirhaghi, 'Effect of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition,' Applied Surface Science, pp. 99-106, 1995 https://doi.org/10.1016/0169-4332(94)00405-6
  15. K. Ogata, S.-W. Kim, 'ZnO growth on Si substrates by metalorganic vapor phase epitaxy,' Journal of crystal growth, pp. 112-116, 2002 https://doi.org/10.1016/S0022-0248(02)00911-9
  16. Zhuxi Fu, Bixia Lin, 'The effect of Zn buffer layer on growth and luminescence of ZnO films deposited on Sisubstrates,' Journal of crystal growth, pp. 316-321, 1998 https://doi.org/10.1016/S0022-0248(98)00511-9
  17. K. Ogata, T. Kawanishi, 'ZnO growth using homoepitaxial technique on sapphire and Si substrates by metalorganic vapor phase epitaxy,' Journal of crystal growth, pp. 237-239, 2002
  18. Y.L. Liu, Y.C. Liu, 'Structural and optical properties of nanocrystalline ZnO films grown by cathodic electrodeposition on Si substrates,' Applied physics B, 2000 https://doi.org/10.1016/S0921-4526(02)00594-X
  19. Maria Dinescu, P. Verardi, 'ZnO thin film deposition by laser ablation of Zn target in oxygen reactive atmosphere,' Applied surface science, pp. 149-153, 1996 https://doi.org/10.1016/S0169-4332(97)80013-X
  20. Y.R. Ryu, S. Zhu, 'Synthesis of p-type ZnO films,' Journal of crystal growth, pp. 330-334, 2000 https://doi.org/10.1016/S0022-0248(00)00437-1
  21. S. Muthukumar, C.R. Gorla, 'Control of morphology and orientation of ZnO thin films grown on $SiO_2/Si$ substrates,' Journal of crystal growth, pp. 197-201, 2001 https://doi.org/10.1016/S0022-0248(01)00874-0
  22. 배상혁,이상렬, 'PLD로 증착한 ZnO박막의 발광 특성분석', 추계학술대회 논문집, 대한전기학회, 2000
  23. A.B. Djurisic, Y. Chan, 'The optical dielectric function of ZnO,' Applied physics, 2002 https://doi.org/10.1007/s003390201290
  24. Simon L. King, J.G.E. Gardeniers, 'Pulsed-laser deposited ZnO for device applications,' Applied surface science, pp. 811-818, 1996 https://doi.org/10.1016/0169-4332(96)80027-4