FCVA 방법으로 증착된 다이아몬드상 탄소 박막의 XPS 및 XRR 특성 연구

A Study on XPS and XRR Characteristics of DLC films Deposited by FCVA Method

  • 박창균 (한양대 전자전기제어계측공학과) ;
  • 장석모 (한양대 전자전기제어계측공학과) ;
  • 엄현석 (한양대 전자전기제어계측공학과) ;
  • 서수형 (한양대 무기재료공학과) ;
  • 박진석 (한양대 전자컴퓨터공학부)
  • 발행 : 2003.03.01


Diamond-like carbon (DLC) films are deposited at room temperature using a filtered cathodic vacuum arc (FCVA) technique. The influence of negative bias voltage (applied to the substrate from 0 to -250V) on the $sp^3$ hybridized carbon fraction is examined by Raman spectroscopy and x-ray photoelectron spectroscopy (XPS) for C 1s core peak. For the first time, depth profile of C 1s, Si 2p, and O 1s XPS peaks for the deposited DLC film are obtained. DLC film is modeled as a multilayered structure. composing of surface, bulk, and interface. In addition, the x-ray reflectivity (XRR) is proposed as a method for estimating the density, surface roughness, and thickness of each layer constituting the DLC film. The estimated thickness of DLC film is in good agreement with the result obtained from the transmission electron microscope (TEM) measurement.



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